JPH0242406B2 - - Google Patents
Info
- Publication number
- JPH0242406B2 JPH0242406B2 JP18376483A JP18376483A JPH0242406B2 JP H0242406 B2 JPH0242406 B2 JP H0242406B2 JP 18376483 A JP18376483 A JP 18376483A JP 18376483 A JP18376483 A JP 18376483A JP H0242406 B2 JPH0242406 B2 JP H0242406B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- light receiving
- receiving system
- reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002159 abnormal effect Effects 0.000 claims description 34
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 17
- 238000007689 inspection Methods 0.000 claims description 9
- 238000011179 visual inspection Methods 0.000 claims description 9
- 230000007547 defect Effects 0.000 description 12
- 238000005520 cutting process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18376483A JPS6073409A (ja) | 1983-09-30 | 1983-09-30 | 外観検査方法およびその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18376483A JPS6073409A (ja) | 1983-09-30 | 1983-09-30 | 外観検査方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6073409A JPS6073409A (ja) | 1985-04-25 |
| JPH0242406B2 true JPH0242406B2 (en]) | 1990-09-21 |
Family
ID=16141558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18376483A Granted JPS6073409A (ja) | 1983-09-30 | 1983-09-30 | 外観検査方法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6073409A (en]) |
-
1983
- 1983-09-30 JP JP18376483A patent/JPS6073409A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6073409A (ja) | 1985-04-25 |
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